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Journal: Coatings, 2023
Volume: 13
Number: 188
188
Article: A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms
Authors: by M. Sabzi, S. H. Mousavi Anijdan, M. Shamsodin, M. Farzam, A. Hojjati-Najafabadi, P. Feng, N. Park and U. Lee
Link: https://www.mdpi.com/2079-6412/13/1/188

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