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Journal: Coatings, 2022
Volume: 12
Number: 1342
Article:
Helium Metastable Distributions and Their Effect on the Uniformity of Hydrogenated Amorphous Silicon Depositions in He/SiH4 Capacitively Coupled Plasmas
Authors:
by
Sanghyun Jo, Suik Kang, Kyungjun Lee and Ho Jun Kim
Link:
https://www.mdpi.com/2079-6412/12/9/1342
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