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Journal: CoatingsVolume: 12Number: 1342
Article: Helium Metastable Distributions and Their Effect on the Uniformity of Hydrogenated Amorphous Silicon Depositions in He/SiH4 Capacitively Coupled Plasmas
  • Authors:
  • Sanghyun Jo1,
  • Suik Kang1 and
  • Kyungjun Lee1,*
  • et al.
Link: https://www.mdpi.com/2079-6412/12/9/1342

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