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Journal: Coatings, 2022
Volume: 12
Number: 404
Article:
Influence to Hardness of Alternating Sequence of Atomic Layer Deposited Harder Alumina and Softer Tantala Nanolaminates
Authors:
by
Helle-Mai Piirsoo, Taivo Jõgiaas, Peeter Ritslaid, Kaupo Kukli and Aile Tamm
Link:
https://www.mdpi.com/2079-6412/12/3/404
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