Liang, C.; Zhong, Y.; Zhong, Q.; Li, J.; Cao, W.; Wang, X.; Wang, S.; Xu, X.; Wang, J.; Cao, Y.
Low-Temperature Deposition of High-Quality SiO2 Films with a Sloped Sidewall Profile for Vertical Step Coverage. Coatings 2022, 12, 1411.
https://doi.org/10.3390/coatings12101411
AMA Style
Liang C, Zhong Y, Zhong Q, Li J, Cao W, Wang X, Wang S, Xu X, Wang J, Cao Y.
Low-Temperature Deposition of High-Quality SiO2 Films with a Sloped Sidewall Profile for Vertical Step Coverage. Coatings. 2022; 12(10):1411.
https://doi.org/10.3390/coatings12101411
Chicago/Turabian Style
Liang, Congcong, Yuan Zhong, Qing Zhong, Jinjin Li, Wenhui Cao, Xueshen Wang, Shijian Wang, Xiaolong Xu, Jian Wang, and Yue Cao.
2022. "Low-Temperature Deposition of High-Quality SiO2 Films with a Sloped Sidewall Profile for Vertical Step Coverage" Coatings 12, no. 10: 1411.
https://doi.org/10.3390/coatings12101411
APA Style
Liang, C., Zhong, Y., Zhong, Q., Li, J., Cao, W., Wang, X., Wang, S., Xu, X., Wang, J., & Cao, Y.
(2022). Low-Temperature Deposition of High-Quality SiO2 Films with a Sloped Sidewall Profile for Vertical Step Coverage. Coatings, 12(10), 1411.
https://doi.org/10.3390/coatings12101411