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Journal: Coatings, 2021
Volume: 11
Number: 911

Article: Effect of Bias Voltage on Microstructure and Properties of Tantalum Nitride Coatings Deposited by RF Magnetron Sputtering
Authors: by Wei Dai and Yunzhan Shi
Link: https://www.mdpi.com/2079-6412/11/8/911

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