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Journal: Coatings, 2021
Volume: 11
Number: 906

Article: Etching Characteristics and Changes in Surface Properties of IGZO Thin Films by O2 Addition in CF4/Ar Plasma
Authors: by Chea-Young Lee, Young-Hee Joo, Minsoo P. Kim, Doo-Seung Um and Chang-Il Kim
Link: https://www.mdpi.com/2079-6412/11/8/906

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