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Journal: Coatings, 2021
Volume: 11
Number: 580

Article: Heterogeneous Bonding of PMMA and Double-Sided Polished Silicon Wafers through H2O Plasma Treatment for Microfluidic Devices
Authors: by Chao-Ching Chiang, Philip Nathaniel Immanuel, Yi-Hsiung Chiu and Song-Jeng Huang
Link: https://www.mdpi.com/2079-6412/11/5/580

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