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Journal: Coatings, 2021
Volume: 11
Number: 579

Article: Effect of Ion Energy on the Microstructure and Properties of Titanium Nitride Thin Films Deposited by High Power Pulsed Magnetron Sputtering
Authors: by Donglin Ma, Qiaoyuan Deng, Huaiyuan Liu and Yongxiang Leng
Link: https://www.mdpi.com/2079-6412/11/5/579

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