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Journal: Coatings, 2021
Volume: 11
Number: 574

Article: Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides
Authors: by Ľuboš Podlucký, Andrej Vincze, Soňa Kováčová, Juraj Chlpík, Jaroslav Kováč and František Uherek
Link: https://www.mdpi.com/2079-6412/11/5/574

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