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Journal: Coatings, 2021
Volume: 11
Number: 524

Article: Deposition of Nb-Si-C Thin Films by Radio Frequency Magnetron Sputtering
Authors: by Zifeng Li, Guotan Liu, Guanqi Liu, Xiaoshuo Zhu and Yudong Fu
Link: https://www.mdpi.com/2079-6412/11/5/524

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