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Journal: Coatings, 2021
Volume: 11
Number: 510
Article:
Optical Constant and Conformality Analysis of SiO2 Thin Films Deposited on Linear Array Microstructure Substrate by PECVD
Authors:
by
Yongqiang Pan, Huan Liu, Zhuoman Wang, Jinmei Jia and Jijie Zhao
Link:
https://www.mdpi.com/2079-6412/11/5/510
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