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Journal: Coatings, 2021
Volume: 11
Number: 397

Article: Effects of Thermal Annealing on the Characteristics of High Frequency FBAR Devices
Authors: by Yu-Chen Chang, Ying-Chung Chen, Bing-Rui Li, Wei-Che Shih, Jyun-Min Lin, Wei-Tsai Chang and Chien-Chuan Cheng
Link: https://www.mdpi.com/2079-6412/11/4/397

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