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Journal: Coatings, 2021
Volume: 11
Number: 365

Article: Two-Step Deposition of Silicon Oxide Films Using the Gas Phase Generation of Nanoparticles in the Chemical Vapor Deposition Process
Authors: by Jae-Ho Suk, Sung-Chun Hong, Gil-Su Jang and Nong-Moon Hwang
Link: https://www.mdpi.com/2079-6412/11/3/365

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