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Journal: Coatings, 2021
Volume: 11
Number: 314

Article: In-Situ Repair Plasma-Induced Damage and Cap Dielectric Barrier for Porous Low-Dielectric-Constant Materials by HMDS Plasma Treatment
Authors: by Chih-Yen Lee, Chi-Yang Yan and Yi-Lung Cheng
Link: https://www.mdpi.com/2079-6412/11/3/314

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