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Journal: Coatings, 2021
Volume: 11
Number: 289

Article: Study of Residual Stress Compensation in Continuous Membrane Micromirrors Based on Surface Micromachining Processes
Authors: by Qiang Wang, Weimin Wang, Liang Fang, Chongxi Zhou and Bin Fan
Link: https://www.mdpi.com/2079-6412/11/3/289

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