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Journal: Coatings, 2021
Volume: 11
Number: 132

Article: Effect of Pressure on the Film Deposition during RF Magnetron Sputtering Considering Charged Nanoparticles
Authors: by Du-Yun Kim, Ji-Hye Kwon, Gil-Su Jang and Nong-Moon Hwang
Link: https://www.mdpi.com/2079-6412/11/2/132

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