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Journal: Coatings, 2021
Volume: 11
Number: 1551
1551
Article: Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target
Authors: by Majid Salehi, Pedram Heidari, Behrooz Ruhani, Amanj Kheradmand, Violeta Purcar and Simona Căprărescu
Link: https://www.mdpi.com/2079-6412/11/12/1551

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