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Journal: Coatings, 2021
Volume: 11
Number: 1551
Article:
Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target
Authors:
by
Majid Salehi, Pedram Heidari, Behrooz Ruhani, Amanj Kheradmand, Violeta Purcar and Simona Căprărescu
Link:
https://www.mdpi.com/2079-6412/11/12/1551
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