Salehi, M.; Heidari, P.; Ruhani, B.; Kheradmand, A.; Purcar, V.; Căprărescu, S.
Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target. Coatings 2021, 11, 1551.
https://doi.org/10.3390/coatings11121551
AMA Style
Salehi M, Heidari P, Ruhani B, Kheradmand A, Purcar V, Căprărescu S.
Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target. Coatings. 2021; 11(12):1551.
https://doi.org/10.3390/coatings11121551
Chicago/Turabian Style
Salehi, Majid, Pedram Heidari, Behrooz Ruhani, Amanj Kheradmand, Violeta Purcar, and Simona Căprărescu.
2021. "Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target" Coatings 11, no. 12: 1551.
https://doi.org/10.3390/coatings11121551
APA Style
Salehi, M., Heidari, P., Ruhani, B., Kheradmand, A., Purcar, V., & Căprărescu, S.
(2021). Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target. Coatings, 11(12), 1551.
https://doi.org/10.3390/coatings11121551