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Biosensors 2018, 8(1), 18;

A Real-Time Thermal Self-Elimination Method for Static Mode Operated Freestanding Piezoresistive Microcantilever-Based Biosensors

Persol Technology Staff Co., Ltd., Tokyo 163-0451, Japan
Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan
Department of Mechanical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
Author to whom correspondence should be addressed.
Received: 22 January 2018 / Revised: 19 February 2018 / Accepted: 26 February 2018 / Published: 28 February 2018
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Here, we provide a method and apparatus for real-time compensation of the thermal effect of single free-standing piezoresistive microcantilever-based biosensors. The sensor chip contained an on-chip fixed piezoresistor that served as a temperature sensor, and a multilayer microcantilever with an embedded piezoresistor served as a biomolecular sensor. This method employed the calibrated relationship between the resistance and the temperature of piezoresistors to eliminate the thermal effect on the sensor, including the temperature coefficient of resistance (TCR) and bimorph effect. From experimental results, the method was verified to reduce the signal of thermal effect from 25.6 μV/°C to 0.3 μV/°C, which was approximately two orders of magnitude less than that before the processing of the thermal elimination method. Furthermore, the proposed approach and system successfully demonstrated its effective real-time thermal self-elimination on biomolecular detection without any thermostat device to control the environmental temperature. This method realizes the miniaturization of an overall measurement system of the sensor, which can be used to develop portable medical devices and microarray analysis platforms. View Full-Text
Keywords: thermal elimination; piezoresistive microcantilever; system miniaturization thermal elimination; piezoresistive microcantilever; system miniaturization

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Ku, Y.-F.; Huang, L.-S.; Yen, Y.-K. A Real-Time Thermal Self-Elimination Method for Static Mode Operated Freestanding Piezoresistive Microcantilever-Based Biosensors. Biosensors 2018, 8, 18.

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