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Open AccessArticle

Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

by Jianhao Zhang 1,2,†, Zhiwei Fang 3,4,†, Jintian Lin 1, Junxia Zhou 3,4, Min Wang 3,4, Rongbo Wu 1,2, Renhong Gao 1,2 and Ya Cheng 1,3,4,5,*
1
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
4
The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China
5
Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Nanomaterials 2019, 9(9), 1218; https://doi.org/10.3390/nano9091218
Received: 24 July 2019 / Revised: 25 August 2019 / Accepted: 26 August 2019 / Published: 29 August 2019
(This article belongs to the Special Issue Laser Printing of Nanophotonic Structures)
We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°. View Full-Text
Keywords: lithium niobate microdisk resonator; controllable wedge angle; high quality factors; chemo-mechanical polish lithium niobate microdisk resonator; controllable wedge angle; high quality factors; chemo-mechanical polish
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Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials 2019, 9, 1218.

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