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Journal: Nanomaterials, 2019
Volume: 9
Number: 1035

Article: ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition
Authors: by Alireza M. Kia, Nora Haufe, Sajjad Esmaeili, Clemens Mart, Mikko Utriainen, Riikka L. Puurunen and Wenke Weinreich
Link: https://www.mdpi.com/2079-4991/9/7/1035

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