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Performance-Enhanced 365 nm UV LEDs with Electrochemically Etched Nanoporous AlGaN Distributed Bragg Reflectors

by Xingdong Lu 1,2, Jing Li 1,2,*, Kang Su 1,2, Chang Ge 1,2, Zhicong Li 1,2, Teng Zhan 1,2, Guohong Wang 1,2 and Jinmin Li 1,2
1
Semiconductor Lighting Research and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2019, 9(6), 862; https://doi.org/10.3390/nano9060862
Received: 5 May 2019 / Revised: 31 May 2019 / Accepted: 2 June 2019 / Published: 6 June 2019
(This article belongs to the Special Issue Advances in the Electrochemical Fabrication of Nanoporous Materials)
A 365-nm UV LED was fabricated based on embedded nanoporous AlGaN distributed Bragg reflectors (DBR) by electrochemical etching. The porous DBR had a reflectance of 93.5% at the central wavelength of 365 nm; this is the highest value of porous AlGaN DBRs below 370 nm which has been reported so far. An innovative two-step etching method with a SiO2 sidewall protection layer (SPL) was proposed to protect the n-AlGaN layer and active region of UV LED from being etched by the electrolyte. The DBR-LED with SPL showed 54.3% improvement of maximal external quantum efficiency (EQE) and 65.7% enhancement of optical power at 100 mA without any degeneration in electrical properties, compared with the un-etched standard LED sample. This work has paved the way for the application of electrically-pumped UV LEDs and VCSELs based on nanoporous AlGaN DBRs. View Full-Text
Keywords: 365 nm UV LED; nanoporous AlGaN DBR; two-step etching; sidewall protection layer; DBR-LED; electrically pumped 365 nm UV LED; nanoporous AlGaN DBR; two-step etching; sidewall protection layer; DBR-LED; electrically pumped
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Lu, X.; Li, J.; Su, K.; Ge, C.; Li, Z.; Zhan, T.; Wang, G.; Li, J. Performance-Enhanced 365 nm UV LEDs with Electrochemically Etched Nanoporous AlGaN Distributed Bragg Reflectors. Nanomaterials 2019, 9, 862.

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