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Direct Observation of Monolayer MoS2 Prepared by CVD Using In-Situ Differential Reflectance Spectroscopy

1
School of Control Science and Engineering, Shandong University, Jinan 250061, China
2
Institute of Marine Science and Technology, Shandong University, Qingdao 266237, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2019, 9(11), 1640; https://doi.org/10.3390/nano9111640
Received: 16 October 2019 / Revised: 2 November 2019 / Accepted: 3 November 2019 / Published: 19 November 2019
The in-situ observation is of great significance to the study of the growth mechanism and controllability of two-dimensional transition metal dichalcogenides (TMDCs). Here, the differential reflectance spectroscopy (DRS) was performed to monitor the growth of molybdenum disulfide (MoS2) on a SiO2/Si substrate prepared by chemical vapor deposition (CVD). A home-built in-situ DRS setup was applied to monitor the growth of MoS2 in-situ. The formation and evolution of monolayer MoS2 are revealed by differential reflectance (DR) spectra. The morphology, vibration mode, absorption characteristics and thickness of monolayer MoS2 have been confirmed by optical microscopy, Raman spectroscopy, ex-situ DR spectra, and atomic force microscopy (AFM) respectively. The results demonstrated that DRS was a powerful tool for in-situ observations and has great potential for growth mechanism and controllability of TMDCs prepared by CVD. To the best of the authors’ knowledge, it was the first report in which the CVD growth of two-dimensional TMDCs has been investigated in-situ by reflectance spectroscopy. View Full-Text
Keywords: in-situ differential reflectance spectroscopy; chemical vapor deposition; transition metal dichalcogenides in-situ differential reflectance spectroscopy; chemical vapor deposition; transition metal dichalcogenides
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Wang, Y.; Zhang, L.; Su, C.; Xiao, H.; Lv, S.; Zhang, F.; Sui, Q.; Jia, L.; Jiang, M. Direct Observation of Monolayer MoS2 Prepared by CVD Using In-Situ Differential Reflectance Spectroscopy. Nanomaterials 2019, 9, 1640.

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