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Open AccessArticle

Notable Enhancement of Phase Transition Performance and Luminous Transmittance in VO2 Films via Simple Method of Ar/O Plasma Post-Treatment

1
Shenzhen Key Laboratory of Advanced Thin Films and Applications, College of Physics and Energy, Shenzhen University, Shenzhen 518060, China
2
Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
3
College of Chemistry and Environmental Engineering, Shenzhen University, Shenzhen 518060, China
*
Authors to whom correspondence should be addressed.
Nanomaterials 2019, 9(1), 102; https://doi.org/10.3390/nano9010102
Received: 16 December 2018 / Revised: 9 January 2019 / Accepted: 10 January 2019 / Published: 16 January 2019
(This article belongs to the Special Issue Design and Development of Nanostructured Thin Films)
Ar/O plasma irradiation is proposed for post-treatment of vanadium dioxide (VO2) films. Oxidation and surface migration were observed in the VO2 films following irradiation. This combined effect leads to an effective stoichiometry refinement and microstructure reconstruction in the interfacial area. A notable improvement in luminous transmittance and an enhancement in phase transition performance of the treated VO2 films were achieved. Compared with that of as-deposited VO2 films, the electrical phase transition amplitude of treated films increased more than two-fold. The relative improvement in luminous transmittance (380–780 nm) is 47.4% (from 25.1% to 37%) and the increase in solar transmittance is 66.9% (from 29.9% to 49.9%), which is comparable to or better than the previous work using anti-reflection (AR) coatings or doping methods. The interfacial boundary state proved to be crucial and Ar/O plasma irradiation offers an effective approach for further refinement of thermochromic VO2 films. View Full-Text
Keywords: vanadium dioxide; post-treatment; plasma irradiation; luminous transmittance; phase transition performance vanadium dioxide; post-treatment; plasma irradiation; luminous transmittance; phase transition performance
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MDPI and ACS Style

Jin, J.; Zhang, D.; Qin, X.; Yang, Y.; Huang, Y.; Guan, H.; He, Q.; Fan, P.; Lv, W. Notable Enhancement of Phase Transition Performance and Luminous Transmittance in VO2 Films via Simple Method of Ar/O Plasma Post-Treatment. Nanomaterials 2019, 9, 102.

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