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Journal: Nanomaterials, 2017
Volume: 7
Number: 183

Article: Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings
Authors: by Tzu-Ken Lin, Wei-Kai Wang, Shih-Yung Huang, Chi-Tsung Tasi and Dong-Sing Wuu
Link: https://www.mdpi.com/2079-4991/7/7/183

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