Oxygen Partial Pressure Impact on Characteristics of Indium Titanium Zinc Oxide Thin Film Transistor Fabricated via RF Sputtering
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Supplementary Materials
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Samples | Oxygen Flow Ratio | VT (V) | eff (cm2/Vs) | On-Off Current Ratio | SS (V/dec) | Nt (cm−2) |
---|---|---|---|---|---|---|
Sample A | 2% | −0.35 | 1.625 | 1.5 × 105 | 0.32 | 4.6 × 1011 |
Sample B | 4% | −0.9 | 0.884 | 5.5 × 105 | 0.41 | 6.2 × 1011 |
Sample C | 6% | −0.5 | 0.235 | 1.1 × 103 | 1.62 | 2.8 × 1012 |
Sample D | 8% | −1.4 | 0.006 | 1.4 × 102 | 2.46 | 4.3 × 1012 |
Sample E | 10% | −4 | 0.004 | 1.1 × 101 | 8.57 | 1.5 × 1013 |
Materials | Deposition Method | VT (V) | eff (cm2/Vs) | On-Off Current Ratio | SS (V/dec) | Nt (cm−2) |
---|---|---|---|---|---|---|
InZnO [29] | Sol–gel | 0.18 | 0.15 | 105 | 0.86 | N.A. |
InMgZnO [30] | Sol–gel | N.A. | 0.56 | 105 | 2.2 | N.A. |
InTiZnO [31] | Sol–gel | 8.49 | 0.04 | 104 | 1.06 | N.A |
InTiZnO [24] | PLD | 7.89 | 2.58 | 108 | 0.76 | 1.5 × 1012 |
InTiZnO, Sample A (this work) | sputter | −0.35 | 1.625 | 1.5 × 105 | 0.32 | 5.7 × 1011 |
InTiZnO, Sample B (this work) | sputter | −0.9 | 0.884 | 5.5 × 105 | 0.41 | 7.3 × 1011 |
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Hsu, M.-H.; Chang, S.-P.; Chang, S.-J.; Wu, W.-T.; Li, J.-Y. Oxygen Partial Pressure Impact on Characteristics of Indium Titanium Zinc Oxide Thin Film Transistor Fabricated via RF Sputtering. Nanomaterials 2017, 7, 156. https://doi.org/10.3390/nano7070156
Hsu M-H, Chang S-P, Chang S-J, Wu W-T, Li J-Y. Oxygen Partial Pressure Impact on Characteristics of Indium Titanium Zinc Oxide Thin Film Transistor Fabricated via RF Sputtering. Nanomaterials. 2017; 7(7):156. https://doi.org/10.3390/nano7070156
Chicago/Turabian StyleHsu, Ming-Hung, Sheng-Po Chang, Shoou-Jinn Chang, Wei-Ting Wu, and Jyun-Yi Li. 2017. "Oxygen Partial Pressure Impact on Characteristics of Indium Titanium Zinc Oxide Thin Film Transistor Fabricated via RF Sputtering" Nanomaterials 7, no. 7: 156. https://doi.org/10.3390/nano7070156