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Journal: Nanomaterials, 2025
Volume: 15
Number: 425
Article:
The Chemical Deformation of a Thermally Cured Polyimide Film Surface into Neutral 1,2,4,5-Benzentetracarbonyliron and 4,4′-Oxydianiline to Remarkably Enhance the Chemical–Mechanical Planarization Polishing Rate
Authors:
by
Man-Hyup Han, Hyun-Sung Koh, Il-Haeng Heo, Myung-Hoe Kim, Pil-Su Kim, Min-Uk Jeon, Min-Ji Kim, Woo-Hyun Jin, Kyoo-Chul Cho, Jinsub Park and Jea-Gun Park
Link:
https://www.mdpi.com/2079-4991/15/6/425
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