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Journal: Nanomaterials, 2025
Volume: 15
Number: 719
Article:
Relation Between Thickness and TFTs Properties of HfO2 Dielectric Layer Synthesized by Plasma-Enhanced Atomic Layer Deposition
Authors:
by
Qizhen Chen, Wanqiang Fu, Jing Han, Xiaoying Zhang and Shui-Yang Lien
Link:
https://www.mdpi.com/2079-4991/15/10/719
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