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Journal: Nanomaterials, 2024
Volume: 14
Number: 1801
1801
Article: Characterization of HZO Films Fabricated by Co-Plasma Atomic Layer Deposition for Ferroelectric Memory Applications
Authors: by Won-Ji Park, Ha-Jung Kim, Joung-Ho Lee, Jong-Hwan Kim, Sae-Hoon Uhm, So-Won Kim and Hee-Chul Lee
Link: https://www.mdpi.com/2079-4991/14/22/1801

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