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Journal: Nanomaterials, 2024
Volume: 14
Number: 1466
1466
Article: High-Extraction-Rate Ta₂O₅-Core/SiO₂-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
Authors: by Jian Liu, Youting Liang, Lang Gao, Chao Sun, Jianglin Guan, Zhe Wang, Zhaoxiang Liu, Zhiwei Fang, Min Wang, Haisu Zhang and Ya Cheng
Link: https://www.mdpi.com/2079-4991/14/17/1466

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