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Journal: Nanomaterials, 2024
Volume: 14
Number: 934

Article: DC-free Method to Evaluate Nanoscale Equivalent Oxide Thickness: Dark-Mode Scanning Capacitance Microscopy
Authors: by Mao-Nan Chang, Yi-Shan Wu, Chiao-Jung Lin, Yu-Hsun Hsueh, Chun-Jung Su and Yao-Jen Lee
Link: https://www.mdpi.com/2079-4991/14/11/934

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