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Journal: Nanomaterials, 2023
Volume: 13
Number: 976
Article:
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics
Authors:
by
Valerio Di Palma, Andrea Pianalto, Michele Perego, Graziella Tallarida, Davide Codegoni and Marco Fanciulli
Link:
https://www.mdpi.com/2079-4991/13/6/976
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