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Journal: Nanomaterials, 2023
Volume: 13
Number: 390
Article:
Fumed Silica-Based Ultra-High-Purity Synthetic Quartz Powder via Sol–Gel Process for Advanced Semiconductor Process beyond Design Rule of 3 nm
Authors:
by
Ji-Ho Choi, Woo-Guk Lee, Tae-Hun Shim and Jea-Gun Park
Link:
https://www.mdpi.com/2079-4991/13/3/390
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