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Journal: Nanomaterials, 2023
Volume: 13
Number: 3110
3110
Article: Novel Energetic Co-Reactant for Thermal Oxide Atomic Layer Deposition: The Impact of Plasma-Activated Water on Al₂O₃ Film Growth
Authors: by João Chaves, William Chiappim, Júlia Karnopp, Benedito Neto, Douglas Leite, Argemiro da Silva Sobrinho and Rodrigo Pessoa
Link: https://www.mdpi.com/2079-4991/13/24/3110

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