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Journal: Nanomaterials, 2023
Volume: 13
Number: 3110
Article:
Novel Energetic Co-Reactant for Thermal Oxide Atomic Layer Deposition: The Impact of Plasma-Activated Water on Al2O3 Film Growth
Authors:
by
João Chaves, William Chiappim, Júlia Karnopp, Benedito Neto, Douglas Leite, Argemiro da Silva Sobrinho and Rodrigo Pessoa
Link:
https://www.mdpi.com/2079-4991/13/24/3110
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