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Journal: NanomaterialsVolume: 13Number: 2281
Article: Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics
- Authors:
- Darija Astrauskytė1,
- Karolis Galvanauskas2 and
- Darius Gailevičius2
- et al.
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