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Journal: Nanomaterials, 2023
Volume: 13
Number: 1765
1765
Article: High Performance On-Chip Energy Storage Capacitors with Plasma-Enhanced Atomic Layer-Deposited Hf_0.5Zr_0.5O₂/Al-Doped Hf_0.25Zr_0.75O₂ Nanofilms as Dielectrics
Authors: by Yuli He, Guang Zheng, Bao Zhu, Xiaohan Wu, Wen-Jun Liu, David Wei Zhang and Shi-Jin Ding
Link: https://www.mdpi.com/2079-4991/13/11/1765

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