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Journal: Nanomaterials, 2023
Volume: 13
Number: 94
Article:
Long-Term Operational Stability of Ta/Pt Thin-Film Microheaters: Impact of the Ta Adhesion Layer
Authors:
by
Ivan A. Kalinin, Ilya V. Roslyakov, Dmitry N. Khmelenin and Kirill S. Napolskii
Link:
https://www.mdpi.com/2079-4991/13/1/94
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