Order Article Reprints

Yang Y, Zhang X-Y, Wang C, Ren F-B, Zhu R-F, Hsu C-H, Wu W-Y, Wuu D-S, Gao P, Ruan Y-J, et al. Compact Ga₂O₃ Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature. Nanomaterials. 2022; 12(9):1510. https://doi.org/10.3390/nano12091510

Yang, Yue, Xiao-Ying Zhang, Chen Wang, Fang-Bin Ren, Run-Feng Zhu, Chia-Hsun Hsu, Wan-Yu Wu, Dong-Sing Wuu, Peng Gao, Yu-Jiao Ruan, and et al. 2022. "Compact Ga₂O₃ Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature" Nanomaterials 12, no. 9: 1510. https://doi.org/10.3390/nano12091510

Yang, Y., Zhang, X.-Y., Wang, C., Ren, F.-B., Zhu, R.-F., Hsu, C.-H., Wu, W.-Y., Wuu, D.-S., Gao, P., Ruan, Y.-J., Lien, S.-Y., & Zhu, W.-Z. (2022). Compact Ga₂O₃ Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature. Nanomaterials, 12(9), 1510. https://doi.org/10.3390/nano12091510