Next Article in Journal
Hydrotalcite-Embedded Magnetite Nanoparticles for Hyperthermia-Triggered Chemotherapy
Previous Article in Journal
Linking Bi-Metal Distribution Patterns in Porous Carbon Nitride Fullerene to Its Catalytic Activity toward Gas Adsorption
Previous Article in Special Issue
Fabrication of Graphene Based Durable Intelligent Personal Protective Clothing for Conventional and Non-Conventional Chemical Threats
Article

Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition

1
Department of Mechanical Engineering (Integrated Engineering Program), Kyung Hee University, Yongin 17104, Korea
2
Department of Materials Science and Engineering, Incheon National University, Incheon 22012, Korea
*
Authors to whom correspondence should be addressed.
These authors equally contributed to this work.
Academic Editor: Jyh-Ming Wu
Nanomaterials 2021, 11(7), 1795; https://doi.org/10.3390/nano11071795
Received: 31 May 2021 / Revised: 15 June 2021 / Accepted: 8 July 2021 / Published: 9 July 2021
(This article belongs to the Special Issue Nanogenerator for Self-Powering Indoor Electronics)
Humid conditions can disrupt the triboelectric signal generation and reduce the accuracy of triboelectric mechanical sensors. This study demonstrates a novel design approach using atomic layer deposition (ALD) to enhance the humidity resistance of triboelectric mechanical sensors. Titanium oxide (TiOx) was deposited on polytetrafluoroethylene (PTFE) film as a moisture passivation layer. To determine the effective ALD process cycle, the TiOx layer was deposited with 100 to 2000 process cycles. The triboelectric behavior and surface chemical bonding states were analyzed before and after moisture exposure. The ALD-TiOx-deposited PTFE showed three times greater humidity stability than pristine PTFE film. Based on the characterization of TiOx on PTFE film, the passivation mechanism was proposed, and it was related to the role of the oxygen-deficient sites in the TiOx layer. This study could provide a novel way to design stable triboelectric mechanical sensors in highly humid environments. View Full-Text
Keywords: atomic layer deposition; surface control; humidity stability; triboelectric behavior atomic layer deposition; surface control; humidity stability; triboelectric behavior
Show Figures

Figure 1

MDPI and ACS Style

Kim, W.; Yasmeen, S.; Nguyen, C.T.; Lee, H.-B.-R.; Choi, D. Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition. Nanomaterials 2021, 11, 1795. https://doi.org/10.3390/nano11071795

AMA Style

Kim W, Yasmeen S, Nguyen CT, Lee H-B-R, Choi D. Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition. Nanomaterials. 2021; 11(7):1795. https://doi.org/10.3390/nano11071795

Chicago/Turabian Style

Kim, Wook, Sumaira Yasmeen, Chi T. Nguyen, Han-Bo-Ram Lee, and Dukhyun Choi. 2021. "Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition" Nanomaterials 11, no. 7: 1795. https://doi.org/10.3390/nano11071795

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop