Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition
Abstract
:1. Introduction
2. Materials and Methods
2.1. Deposition of TiOx on PTFE Film
2.2. Assembly of the TENG Device and Triboelectric Performance Measurement
2.3. Characterization
3. Results and Discussion
3.1. Characteristics of ALD-TiOx on PTFE Film
3.2. Triboelectric Behavior of the ALD-TiOx/PTFE Film
3.3. Moisture Passivation of TiOx and Triboelectric Behaviors
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Conflicts of Interest
References
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Kim, W.; Yasmeen, S.; Nguyen, C.T.; Lee, H.-B.-R.; Choi, D. Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition. Nanomaterials 2021, 11, 1795. https://doi.org/10.3390/nano11071795
Kim W, Yasmeen S, Nguyen CT, Lee H-B-R, Choi D. Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition. Nanomaterials. 2021; 11(7):1795. https://doi.org/10.3390/nano11071795
Chicago/Turabian StyleKim, Wook, Sumaira Yasmeen, Chi Thang Nguyen, Han-Bo-Ram Lee, and Dukhyun Choi. 2021. "Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition" Nanomaterials 11, no. 7: 1795. https://doi.org/10.3390/nano11071795