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Journal: Nanomaterials, 2021
Volume: 11
Number: 1408

Article: Investigation on Ge0.8Si0.2-Selective Atomic Layer Wet-Etching of Ge for Vertical Gate-All-Around Nanodevice
Authors: by Lu Xie, Huilong Zhu, Yongkui Zhang, Xuezheng Ai, Junjie Li, Guilei Wang, Anyan Du, Zhenzhen Kong, Qi Wang, Shunshun Lu, Chen Li, Yangyang Li, Weixing Huang and Henry H. Radamson
Link: https://www.mdpi.com/2079-4991/11/6/1408

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