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Journal: Nanomaterials, 2021
Volume: 11
Number: 956
956
Article: Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps
Authors: by Philipp Taus, Adrian Prinz, Heinz D. Wanzenboeck, Patrick Schuller, Anton Tsenov, Markus Schinnerl, Mostafa M. Shawrav, Michael Haslinger and Michael Muehlberger
Link: https://www.mdpi.com/2079-4991/11/4/956

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