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Open AccessArticle

Blue Electroluminescence in SRO-HFCVD Films

Departamento de Ingeniería Eléctrica y Electrónica, Tecnológico Nacional de México/Instituto Tecnológico de Apizaco Carretera Apizaco-Tzompantepec, Esquina con Av. Instituto Tecnológico S/N. Conurbado Apizaco-Tzompantepec, Apizaco 90300, Mexico
Centro de Investigación en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP), Av. San Claudio y 14 sur, Edif. IC5 C.U., Col. San Manuel, Puebla 72570, Mexico
Facultad de Ingeniería Química, Benemérita Universidad Autónoma de Puebla (BUAP), Puebla 72570, Mexico
Carrera de Mecatrónica, Universidad Tecnológica de Huejotzingo (UTH), Real San Mateo 36B, Segunda Secc, Santa Ana Xalmimilulco, Puebla 74169, Mexico
Departamento de Ingeniería, Benemérita Universidad Autónoma de Puebla-Ciudad Universitaria, Blvd. Valsequillo y Esquina, Av. San Claudio s/n, Col. San Manuel, Puebla 72570, Mexico
Author to whom correspondence should be addressed.
Academic Editors: Minoru Fujii and Jiangshan Chen
Nanomaterials 2021, 11(4), 943;
Received: 31 December 2020 / Revised: 2 March 2021 / Accepted: 17 March 2021 / Published: 8 April 2021
In this work, electroluminescence in Metal-Insulator-Semiconductors (MIS) and Metal-Insulator-Metal (MIM)-type structures was studied. These structures were fabricated with single- and double-layer silicon-rich-oxide (SRO) films by means of Hot Filament Chemical Vapor Deposition (HFCVD), gold and indium tin oxide (ITO) were used on silicon and quartz substrates as a back and front contact, respectively. The thickness, refractive indices, and excess silicon of the SRO films were analyzed. The behavior of the MIS and MIM-type structures and the effects of the pristine current-voltage (I-V) curves with high and low conduction states are presented. The structures exhibit different conduction mechanisms as the Ohmic, Poole–Frenkel, Fowler–Nordheim, and Hopping that contribute to carrier transport in the SRO films. These conduction mechanisms are related to the electroluminescence spectra obtained from the MIS and MIM-like structures with SRO films. The electroluminescence present in these structures has shown bright dots in the low current of 36 uA with a voltage of −20 V to −50 V. However, when applied voltages greater than −67 V with 270 uA, a full area with uniform blue light emission is shown. View Full-Text
Keywords: electroluminescence; HFCVD; conduction mechanisms electroluminescence; HFCVD; conduction mechanisms
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MDPI and ACS Style

Martínez, H.P.; Luna, J.A.; Morales, R.; Casco, J.F.; Hernández, J.A.D.; Luna, A.; Hernández, Z.J.; Mendoza, G.; Monfil, K.; Ramírez, R.; Carrillo, J.; Flores, J. Blue Electroluminescence in SRO-HFCVD Films. Nanomaterials 2021, 11, 943.

AMA Style

Martínez HP, Luna JA, Morales R, Casco JF, Hernández JAD, Luna A, Hernández ZJ, Mendoza G, Monfil K, Ramírez R, Carrillo J, Flores J. Blue Electroluminescence in SRO-HFCVD Films. Nanomaterials. 2021; 11(4):943.

Chicago/Turabian Style

Martínez, Haydee P.; Luna, José A.; Morales, Roberto; Casco, José F.; Hernández, José A.D.; Luna, Adan; Hernández, Zaira J.; Mendoza, Gabriel; Monfil, Karim; Ramírez, Raquel; Carrillo, Jesús; Flores, Javier. 2021. "Blue Electroluminescence in SRO-HFCVD Films" Nanomaterials 11, no. 4: 943.

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