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Open AccessArticle

Atomic Layer Deposition of ZnO on Mesoporous Silica: Insights into Growth Behavior of ZnO via In-Situ Thermogravimetric Analysis

1
BasCat—UniCat BASF JointLab, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany
2
Institut für Chemie, Technische Universität Berlin, 10623 Berlin, Germany
3
Process Research and Chemical Engineering, BASF SE, 67056 Ludwigshafen, Germany
*
Author to whom correspondence should be addressed.
Nanomaterials 2020, 10(5), 981; https://doi.org/10.3390/nano10050981
Received: 28 April 2020 / Revised: 15 May 2020 / Accepted: 19 May 2020 / Published: 20 May 2020
ZnO is a remarkable material with many applications in electronics and catalysis. Atomic layer deposition (ALD) of ZnO on flat substrates is an industrially applied and well-known process. Various studies describe the growth of ZnO layers on flat substrates. However, the growth characteristics and reaction mechanisms of atomic layer deposition of ZnO on mesoporous powders have not been well studied. This study investigates the ZnO ALD process based on diethylzinc (DEZn) and water with silica powder as substrate. In-situ thermogravimetric analysis gives direct access to the growth rates and reaction mechanisms of this process. Ex-situ analytics, e.g., N2 sorption analysis, XRD, XRF, HRTEM, and STEM-EDX mapping, confirm deposition of homogenous and thin films of ZnO on SiO2. In summary, this study offers new insights into the fundamentals of an ALD process on high surface area powders. View Full-Text
Keywords: atomic layer deposition; ZnO; high surface area; diethylzinc; SiO2 atomic layer deposition; ZnO; high surface area; diethylzinc; SiO2
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MDPI and ACS Style

Ingale, P.; Knemeyer, K.; Piernavieja Hermida, M.; Naumann d’Alnoncourt, R.; Thomas, A.; Rosowski, F. Atomic Layer Deposition of ZnO on Mesoporous Silica: Insights into Growth Behavior of ZnO via In-Situ Thermogravimetric Analysis. Nanomaterials 2020, 10, 981.

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