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Open AccessArticle

Modeling of Catalytic Centers Formation Processes during Annealing of Multilayer Nanosized Metal Films for Carbon Nanotubes Growth

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Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering, Southern Federal University, Taganrog 347922, Russia
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Laboratory of Nanobiotechnology Problems and New Materials, Southern Federal University, Taganrog, Taganrog 347922, Russia
3
Research and Education Center “Nanotechnologies”, Southern Federal University, Taganrog 347922, Russia
*
Author to whom correspondence should be addressed.
Nanomaterials 2020, 10(3), 554; https://doi.org/10.3390/nano10030554
Received: 14 February 2020 / Revised: 12 March 2020 / Accepted: 14 March 2020 / Published: 19 March 2020
(This article belongs to the Section Nanocomposite Thin Films and 2D Materials)
The paper presents a theoretical model of the catalytic centers formation processes during annealing of multilayer nanosized metal films for carbon nanotubes growth. The approach to the description of the model is based on the mass transfer processes under the influence of mechanical thermoelastic stresses, which arise due to the difference in the thermal expansion coefficients of the substrate materials and nanosized metal layers. The thermal stress gradient resulting from annealing creates a drop in the chemical potential over the thickness of the film structure. This leads to the initiation of diffusion mass transfer between the inner and outer surfaces of the films. As a result, the outer surface begins to corrugate and fragment, creating separate islands, which serve as the basis for the catalytic centers formation. Experimental research on the formation of catalytic centers in the structure of Ni/Cr/Si was carried out. It is demonstrated that the proposed model allows to predict the geometric dimensions of the catalytic centers before growing carbon nanotubes. The results can be used to create micro- and nanoelectronics devices based on carbon nanotube arrays. View Full-Text
Keywords: catalytic centers; thermal annealing; multilayer nanosized metal films; carbon nanotubes catalytic centers; thermal annealing; multilayer nanosized metal films; carbon nanotubes
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MDPI and ACS Style

Il’in, O.I.; Rudyk, N.N.; Fedotov, A.A.; Il’ina, M.V.; Cherednichenko, D.I.; Ageev, O.A. Modeling of Catalytic Centers Formation Processes during Annealing of Multilayer Nanosized Metal Films for Carbon Nanotubes Growth. Nanomaterials 2020, 10, 554.

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