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Journal: Membranes, 2023
Volume: 13
Number: 731

Article: Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles
Authors: by Seong Ju Wi, Won Jin Kim, Haneul Kim, Dongmin Jeong, Dong Gi Lee, Jaehyuck Choi, Sang Jin Cho, Lan Yu and Jinho Ahn
Link: https://www.mdpi.com/2077-0375/13/8/731

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