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Journal: Membranes, 2022
Volume: 12
Number: 367

Article: Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
Authors: by Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho and Jinho Ahn
Link: https://www.mdpi.com/2077-0375/12/4/367

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