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Journal: Membranes, 2022
Volume: 12
Number: 367
Article:
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
Authors:
by
Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho and Jinho Ahn
Link:
https://www.mdpi.com/2077-0375/12/4/367
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