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Journal: Membranes, 2022
Volume: 12
Number: 40
40
Article: Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li₃PO₄ Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge
Authors: by Nikolay Gavrilov, Alexander Kamenetskikh, Petr Tretnikov, Alexey Nikonov, Leonid Sinelnikov, Denis Butakov, Viktor Nikolkin and Andrey Chukin
Link: https://www.mdpi.com/2077-0375/12/1/40

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