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Journal: Applied SciencesVolume: 9Number: 3704
Article: Contrast Experiments in Dielectrophoresis Polishing (DEPP)/Chemical Mechanical Polishing (CMP) of Sapphire Substrate
- Authors:
- Tianchen Zhao1,3,4,*,
- Julong Yuan2,4 and
- Qianfa Deng2,*
- et al.
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