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Journal: Appl. Sci., 2019
Volume: 9
Number: 3704
Article:
Contrast Experiments in Dielectrophoresis Polishing (DEPP)/Chemical Mechanical Polishing (CMP) of Sapphire Substrate
Authors:
by
Tianchen Zhao, Julong Yuan, Qianfa Deng, Kaiping Feng, Zhaozhong Zhou and Xu Wang
Link:
https://www.mdpi.com/2076-3417/9/18/3704
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