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A Review of MEMS Scale Piezoelectric Energy Harvester

School of Electro-Mechanical Engineering, Xidian University, Number 2 Taibai South Road, Xi’an 710071, China
Author to whom correspondence should be addressed.
Appl. Sci. 2018, 8(4), 645;
Received: 8 March 2018 / Revised: 13 April 2018 / Accepted: 17 April 2018 / Published: 20 April 2018
(This article belongs to the Section Energy)
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Piezoelectric energy harvester (PEH) is emerging as a novel device which can convert mechanical energy into electrical energy. It is mainly used to collect ambient vibration energy to power sensors, chips and some other small applications. This paper first introduces the working principle of PEH. Then, the paper elaborates the research progress of PEH from three aspects: piezoelectric materials, piezoelectric modes and energy harvester structures. Piezoelectric material is the core of the PEH. The piezoelectric and mechanical properties of piezoelectric material determine its application in energy harvesting. There are three piezoelectric modes, d31, d33 and d15, the choice of which influences the maximum output voltage and power. Matching the external excitation frequency maximizes the conversion efficiency of the energy harvester. There are three approaches proposed in this paper to optimize the PEH’s structure and match the external excitation frequency, i.e., adjusting the resonant frequency, frequency up-converting and broadening the frequency bandwidth. In addition, harvesting maximum output power from the PEH requires impedance matching. Finally, this paper analyzes the above content and predicts PEH’s future development direction. View Full-Text
Keywords: energy harvesting; piezoelectric material; piezoelectric modes; resonant frequency energy harvesting; piezoelectric material; piezoelectric modes; resonant frequency

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Tian, W.; Ling, Z.; Yu, W.; Shi, J. A Review of MEMS Scale Piezoelectric Energy Harvester. Appl. Sci. 2018, 8, 645.

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