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Journal: Appl. Sci., 2016
Volume: 6
Number: 257
Article:
Overview of 3D Micro- and Nanocoordinate Metrology at PTB
Authors:
by
Gaoliang Dai, Michael Neugebauer, Martin Stein, Sebastian Bütefisch and Ulrich Neuschaefer-Rube
Link:
https://www.mdpi.com/2076-3417/6/9/257
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