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Journal: Appl. Sci., 2016
Volume: 6
Number: 257

Article: Overview of 3D Micro- and Nanocoordinate Metrology at PTB
Authors: by Gaoliang Dai, Michael Neugebauer, Martin Stein, Sebastian Bütefisch and Ulrich Neuschaefer-Rube
Link: https://www.mdpi.com/2076-3417/6/9/257

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